Kentaro Kutsukake

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Speaker, Author, Co-Author

Sat. Mar 18, 2023 1:00 PM - 4:30 PM A401 (Building No. 6)

Oral presentation
| 23 Joint Session N "Informatics"
| 23.1 Joint Session N "Informatics"

[18p-A401-1~13] 23.1 Joint Session N "Informatics"

2:45 PM - 3:00 PM

[18p-A401-7] Machine learning for semiconductor process simulation described by coupled differential equation

Rikuya Sato¹, 〇Kentaro Kutsukake^2,3, Shunta Harada^1,3, Miho Tagawa^1,3, Toru Ujihara^1,3 (1.Grad. Sch. Eng., Nagoya Univ., 2.AIP, RIKEN, 3.IMaSS, Nagoya Univ.)

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