Tatsuya Okada

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Chairperson, etc.

Wed. Mar 15, 2023 9:00 AM - 11:30 AM B410 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15a-B410-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Tatsuya Okada(Univ. of the Ryukyus), Yan Wu(Nihon Univ.)