Tatsuya Okada(Univ. of the Ryukyus), Yan Wu(Nihon Univ.)
Yan Wu
Chairperson, etc.
Wed. Mar 15, 2023 9:00 AM - 11:30 AM B410 (Building No. 2)
- Oral presentation
- | 13 Semiconductors
- | 13.4 Si processing /Si based thin film / MEMS / Equipment technology