The 70th JSAP Spring Meeting 2023

Yan Wu

Chairperson, etc.

Wed. Mar 15, 2023 9:00 AM - 11:30 AM B410 (Building No. 2)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Tatsuya Okada(Univ. of the Ryukyus), Yan Wu(Nihon Univ.)