Oral presentation

7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[15a-D209-1~5] 7.3 Micro/Nano patterning and fabrication

Wed. Mar 15, 2023 10:30 AM - 11:45 AM D209 (Building No. 11)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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10:30 AM - 10:45 AM

[15a-D209-1] Fabrication of silicon nanodisk array by UV nanoimprint lithograpy

〇Naoki Takano¹, Hiromasa Niinomi¹, Iori Morita², Kazuhiro Gotoh³, Tomoya Oshikiri¹, Masaru Nakagawa¹ (1.IMRAM, Tohoku Univ., 2.RIEC, Tohoku Univ., 3.Grad. Sch. Eng., Nagoya Univ.)

10:45 AM - 11:00 AM

△ [15a-D209-2] Transcription of atomic-steps on polylactic acid sheets by thermal nanoimprinting

〇Ryuka Umemoto¹, Yuto Maeda¹, Tomoaki Oga¹, Satoru Kaneko^2,1, Mamoru Yoshimoto¹, Akifumi Matsuda¹ (1.Tokyo Tech, 2.KISTEC)

11:00 AM - 11:15 AM

[15a-D209-3] Submicron patterning of titania by nano-Rheology printing

〇Daisuke Hirose¹, Hiroki Yamada², Koji Ohara², Jochi Tseng², Yuzuru Takamura¹ (1.JAIST, 2.JASRI)

11:15 AM - 11:30 AM

[15a-D209-4] Hybrid simulation of stochastic method and molecular dynamics of electron beam lithography for chemically amplified resists

〇Daiki Nakamura¹, Kaito Yamada¹, Bunta Inoue¹, Masaaki Yasuda¹ (1.Osaka Met. Univ.)

11:30 AM - 11:45 AM

[15a-D209-5] Feasibility of Stereophonic Parabolic-Mirror Projection-Exposure Using a Flat Reticle

〇Toshiyuki Horiuchi¹, Hiroshi Kobayashi¹ (1.Tokyo Denki Univ.)

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