[15p-A404-1~19] 6.1 Ferroelectric thin films

[15p-A404-11] Estimation of Residual Hydrogen Contents by PBW of Ferroelectric Materials

Jun Hirade¹, 〇Masaki Yamaguchi^1,2, Hideo Kimura³ (1.Fac. of Eng., Shibaura Inst. of Tech., 2.IRCGE, Shibaura Inst. of Tech., 3.Yantai Univ.)

Keywords:Ferroelectric Films, Proton Beam Writing, Residual Hydrogen Contents

We think that the focused proton beam writing (PBW) is very effective for microfabrication of piezoelectric materials containing heavy elements, such as ferroelectric materials. However, although PBW exhibits high photosensitivity, unlike the similar electron beam-induced reaction process, irradiated hydrogen remains in the sample. In this study, the hydrogen content estimation method of hydrogenated amorphous silicon was used to evaluate the residual hydrogen content. The measurement results suggest the residual hydrogen content is about 0.3atm%, and removed easily from the samples by heat treatment.