[15p-B309-1~19] 8.1 Plasma production and diagnostics

△ [15p-B309-6] 【Highlighted Presentation】Diagnosis of Spatial Distribution of Electron Temperature and Electron Density of Argon Inductively Coupled Plasma by Tomographic Optical Emission Spectroscopic Measurement

〇(DC)Yuya Yamashita¹, Kenta Doi², Tetsuji Kiyota², Keiichiro Asakawa², Sotaro Hosoya¹, Wataru Kikuchi¹, Atsushi Nezu¹, Hiroshi Akatsuka¹ (1.Tokyo Tech, 2.ULVAC)

Keywords:optical emission spectroscopic measurement, tomography, collisional-radiative model

In recent years, tomography-based diagnostics have been reported. However, no reports have considered atomic-molecular processes in detail, and the significant uncertainty was caused by excitation-kinetic analysis. In this study, argon inductively coupled plasma by tomographic optical emission spectroscopic measurement. The excitation-kinetics analysis was based on the collisional radiation model, one of the atomic-molecular process models which can describe atomic-molecular processes in detail. A quantitative diagnosis of the spatial distribution of electron temperature and electron density has been produced.