[15p-B309-1~19] 8.1 Plasma production and diagnostics

[15p-B309-7] Diagnosis of Spatial Distribution of Vibrational and Rotational Temperatures of Nitrogen Inductively Coupled Plasma by Tomographic Optical Emission Spectroscopic Measurement

〇Kazuma Yoneda¹, Yuya Yamashita¹, Kenta Doi², Tetsuji Kiyota², Keiichiro Asakawa², Kenta Ishi¹, Atsushi Nezu¹, Hiroshi Akatsuka¹ (1.Tokyo Tech, 2.ULVAC)

Keywords:optical emission spectroscopic measurement, tomography, nitrogen inductively coupled plasma

To gain a better understanding of discharges specific to molecular gases, it is important to investigate the characteristics of nitrogen plasma, as a typical example. In inductively coupled plasma (ICP), which is applied to semiconductor etching processes, the spatial distribution of rotational temperature that approximates the gas temperature is crucial. In this study, nitrogen inductively coupled plasma was measured by tomographic optical emission spectroscopy. The spatial distribution of vibrational and rotational temperatures of N₂ and N₂⁺ were diagnosed by spectral fitting.