[15p-B309-1~19] 8.1 Plasma production and diagnostics

△ [15p-B309-8] Three-dimensional reconstruction method using the fourier-bessel method in surface wave plasmas

〇Miharu Niimoto¹, Akio San¹, Haruhiko Himura¹, Takaya Ninomiya¹, Shinichiro Inagaki¹ (1.KIT)

Keywords:plasma process, three dimensional monitoring, surface wave plasma

The purpose of this research is to develop a passive monitoring system using image measurement to evaluate the uniformity of deposition in plasma processes. The system uses the Fourier-Bessel method to obtain the three-dimensional distribution of plasma emission from images taken through a lens array with multiple lenses of different focal lengths. In this presentation, we will discuss the results of image reconstruction on test data and quantitative evaluation of the accuracy of the reconstruction in relation to the camera's line of sight.