4:45 PM - 5:00 PM
[15p-B410-13] Crystallization of InSb Films on Glass by RTA
Keywords:semiconductor, InSb
ガラス基板上におけるInSn薄膜の急速熱処理法(RTA)による結晶成長を検討した ので報告する。
Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Wed. Mar 15, 2023 1:00 PM - 5:30 PM B410 (Building No. 2)
Masato Sone(Tokyo Tech), Fumito Imura(Hundred Semiconductors Inc.)
4:45 PM - 5:00 PM
Keywords:semiconductor, InSb