[15p-B410-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15p-B410-15] Piezoelectric Valve Micropump Using UV Laser-Patterned Adhesive Sheet

〇Yuki Okamoto¹, Yasuyuki Yamamoto¹, Tomoya Muramoto¹, Masaaki Ichiki¹, Takeshi Kobayashi¹ (1.AIST)

Keywords:MEMS, Piezoelectric thin-film actuator, micropump

Valve micropumps are widely used because of the large pressure output and flow rates. In the typical fabrication of micropumps, the processes are complicated for forming the valve structures. In this study, we report a piezoelectric valve micropump using UV laser-patterned adhesive sheet, enabling us to utilize standard MEMS processes.