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[15p-B410-15] Piezoelectric Valve Micropump Using UV Laser-Patterned Adhesive Sheet
Keywords:MEMS, Piezoelectric thin-film actuator, micropump
Valve micropumps are widely used because of the large pressure output and flow rates. In the typical fabrication of micropumps, the processes are complicated for forming the valve structures. In this study, we report a piezoelectric valve micropump using UV laser-patterned adhesive sheet, enabling us to utilize standard MEMS processes.