[15p-D221-1~14] 9.5 New functional materials and new phenomena

△ [15p-D221-8] Effect of Substrate Surface Conditions before Anodization on Shape of Si Micro-nano Rolls

〇Yangmuyi Qiao¹, Taiki Arai¹, Toshiaki Suzuki¹, Akitaka Yoshigoe², Masaaki Niwa¹, Mitsuya Motohashi¹ (1.Tokyo Denki Univ., 2.JAEA.)

Keywords:Si roll, Pt thin film, anodization

A roll structure (Si roll) was formed on the surface of the Si substrate via anodization using an extremely diluted HF solution. The roll has a microscale length and a diameter of approximately 1 μm. To control the width of the roll, Pt thin film was deposited on the surface of the Si substrates before anodization, and then the roll was formed on the surface. The relationship between the Pt coating and the shape of roll has discussed. As the result, The width of the roll can be controlled by the surface coating. It is promising for application as a new device material by control of Si roll.