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▲ [15p-E102-6] Metal–semiconductor transition of hydrogen-doped In2O3 via solid-phase crystallization.
Keywords:oxide semiconductor, indium oxide
We reported the metal-semiconductor transition (MST) of hydrogen-doped indium oxide (InOx:H) films via low-temperature solid phase crystallization (SPC); however, the MST mechanism has not been clarified. In this presentation, the effect of oxygen and hydrogen during the deposition on the MST of SPC-InOx:H films will be discussed.