[16a-A409-1~10] 3.14 Silicon photonics and integrated photonics (formerly 3.15)

[16a-A409-7] Variation Analysis for Splitting Ratio of Directional Coupler
Based on Waveguide Process Monitoring

〇Tsuyoshi Horikawa¹, Nobuhiko Nishiyama^1,2,3 (1.School of Engineering, Tokyo Institute of Technology, 2.IIR, Tokyo Institute of Technology, 3.PETRA)

Keywords:Silicon photonics, Waveguides, Directional couplers

In order to manufacture silicon photonics integrated circuits with good reproducibility, it is important to monitor and control processing variations and to design and verify robust optical devices. In this paper, we report the analysis results of the variability of the directional coupler based on the extraction result of the highly accurate waveguide processing deviation by the monitoring method using multiple propagation modes.