[16a-B410-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

△ [16a-B410-3] Influence of Cross-sectional Area of Gold Single Crystal Micro-cantilevers on Their Bending Strengths

〇(M1)Ryohei Hori¹, Kazuya Fujita¹, Chun-Yi Chen¹, Tomoyuki Kurioka¹, Tso-Fu Mark Chang¹, Parthojit Chakraborty¹, Katsuyuki Machida¹, Hiroyuki Ito¹, Yoshihiro Miyake¹, Masato Sone¹ (1.Tokyo Tech)

Keywords:size effect, cross-sectional area, bending

The use of Au is proposed in order to increase MEMS accelerometer sensitivity. However, when Au material is used, the mechanical strength is a practical problem. Also, when metallic material is used in micro-scale, it’s necessary to consider sample size effect that the mechanical strength increases compared to bulk-scale. So, evaluating mechanical properties of Au material in micro-scale is important. This research reports influence of the cross-sectional area on the bending deformation of single crystal Au micro-cantilevers.