Effect of Geometric Parameters on Long-Term Structure Stability of Micro-cantilevers Possessing Ti/Au Multi-layered Structures

Ryosuke Miyai; Tomoyuki Kurioka; Chun-Yi Chen; Tso-Fu Mark Chang; Akira Onishi; Parthojit Chakraborty; Katsuyuki Machida; Hiroyuki Ito; Yoshihiro Miyake; Masato Sone

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Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[16a-B410-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Thu. Mar 16, 2023 9:00 AM - 11:30 AM B410 (Building No. 2)

Masato Sone(Tokyo Tech), Reo Kometani(Univ. of Tokyo)

10:15 AM - 10:30 AM

△ [16a-B410-5] Effect of Geometric Parameters on Long-Term Structure Stability of Micro-cantilevers Possessing Ti/Au Multi-layered Structures

〇Ryosuke Miyai¹, Tomoyuki Kurioka¹, Chun-Yi Chen¹, Tso-Fu Mark Chang¹, Akira Onishi¹, Parthojit Chakraborty¹, Katsuyuki Machida¹, Hiroyuki Ito¹, Yoshihiro Miyake¹, Masato Sone¹ (1.Tokyo Tech)

Keywords:MEMS, Au material, Long-Term Structure Stability

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