10:30 AM - 10:45 AM
△ [16a-B410-6] Design of serpentine spring for MEMS devices by gold multi-layer metal technology
Keywords:MEMS, serpentine flexure, gold multi-layer metal technology
Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Thu. Mar 16, 2023 9:00 AM - 11:30 AM B410 (Building No. 2)
Masato Sone(Tokyo Tech), Reo Kometani(Univ. of Tokyo)
10:30 AM - 10:45 AM
Keywords:MEMS, serpentine flexure, gold multi-layer metal technology