[16a-PB05-1~5] 13.2 Exploratory Materials, Physical Properties, Devices

[16a-PB05-4] Evaluation of Al diffusion depth in Mg₂Si substrate by 4-point probe method

〇Kaito Ojima¹, Rikuto Nakamura¹, Haruhiko Udono¹ (1.Ibaraki Univ.)

Keywords:4-point probe method