[16p-A202-1~14] 3.8 Terahertz technologies (formerly 3.9)

▼ [16p-A202-12] Mechanical nonlinearity control in doubly clamped MEMS beam resonators using a preloaded lattice mismatch strain

〇(D)Chao Li¹, Boqi Qiu², Yuri Yoshioka¹, Kazuhiko Hirakawa^2,3, Ya Zhang¹ (1.Inst. of Eng., Tokyo Univ. of Agri. &Techno., 2.IIS Tokyo Univ., 3.INQIE Tokyo Univ.)

Keywords:semiconductor, MEMS resonator, THz sensor

we report on controlling the mechanical nonlinearity by introducing a lattice mismatch strain into the MEMS beams. Both numerical analysis and experiment are performed. In the numerical analysis, we clarify the origin and control mechanism of mechanical nonlinearity in the MEMS beam. The experiment results demonstrate the effectiveness of using lattice mismatch for controlling the mechanical nonlinearity of MEMS resonators.