2023年第70回応用物理学会春季学術講演会

講演情報

一般セッション(口頭講演)

3 光・フォトニクス » 3.8 テラヘルツ全般(旧3.9)

[16p-A202-1~14] 3.8 テラヘルツ全般(旧3.9)

2023年3月16日(木) 13:00 〜 17:00 A202 (6号館)

有川 敬(京大)、縄田 耕二(東北工大)

16:15 〜 16:30

[16p-A202-12] Mechanical nonlinearity control in doubly clamped MEMS beam resonators using a preloaded lattice mismatch strain

〇(D)Chao Li1、Boqi Qiu2、Yuri Yoshioka1、Kazuhiko Hirakawa2,3、Ya Zhang1 (1.Inst. of Eng., Tokyo Univ. of Agri. &Techno.、2.IIS Tokyo Univ.、3.INQIE Tokyo Univ.)

キーワード:semiconductor, MEMS resonator, THz sensor

we report on controlling the mechanical nonlinearity by introducing a lattice mismatch strain into the MEMS beams. Both numerical analysis and experiment are performed. In the numerical analysis, we clarify the origin and control mechanism of mechanical nonlinearity in the MEMS beam. The experiment results demonstrate the effectiveness of using lattice mismatch for controlling the mechanical nonlinearity of MEMS resonators.