4:00 PM - 4:15 PM
[16p-A301-7] [The 53rd Young Scientist Presentation Award Speech] Deep levels formed near the SiO2/SiC interface by thermal oxidation of SiC
Keywords:SiC, DLTS, MOSFET
Oral presentation
13 Semiconductors » 13.7 Compound and power devices, process technology and characterization
Thu. Mar 16, 2023 4:00 PM - 5:30 PM A301 (Building No. 6)
Katsuhiro Kutsuki(Toyota Central R&D Labs.)
4:00 PM - 4:15 PM
Keywords:SiC, DLTS, MOSFET