The 70th JSAP Spring Meeting 2023

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13 Semiconductors » 13.7 Compound and power devices, process technology and characterization

[16p-A301-7~12] 13.7 Compound and power devices, process technology and characterization

Thu. Mar 16, 2023 4:00 PM - 5:30 PM A301 (Building No. 6)

Katsuhiro Kutsuki(Toyota Central R&D Labs.)

4:15 PM - 4:30 PM

[16p-A301-8] Insight into thermal oxidation mechanism of 4H-SiC(0001) surface in CO2 ambient

Ryuta Deguchi1, 〇Takuji Hosoi1 (1.Kwansei Gakuin Univ.)

Keywords:SiC, thermal oxidation, SiO2