The 70th JSAP Spring Meeting 2023

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13 Semiconductors » 13.7 Compound and power devices, process technology and characterization

[16p-A301-7~12] 13.7 Compound and power devices, process technology and characterization

Thu. Mar 16, 2023 4:00 PM - 5:30 PM A301 (Building No. 6)

Katsuhiro Kutsuki(Toyota Central R&D Labs.)

4:30 PM - 4:45 PM

[16p-A301-9] Low contact resistivity at non-alloyed contacts on heavily P+-implanted SiC

〇Masahiro Hara1, Mitsuaki Kaneko1, Tsunenobu Kimoto1 (1.Kyoto Univ.)

Keywords:SiC, ohmic contacts, contact resistivity