5:50 PM - 6:25 PM
[16p-A302-8] 3D Heterogenous Channel Integration Technology for CFET Performance Balance Engineering
Keywords:CFET, CMOS, Bonding
Symposium (Oral)
Symposium » Advanced Surface and Interface Technologies for Micro and Nanoscale Fabrication
Thu. Mar 16, 2023 1:30 PM - 6:25 PM A302 (Building No. 6)
Shutaro Asanuma(AIST), Hayato Sone(Gunma University)
5:50 PM - 6:25 PM
Keywords:CFET, CMOS, Bonding