[16p-A403-1~20] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[16p-A403-13] Molecular Dynamics Simulation of Phase Transition of Nanoscale Molten Salts Surrounded by SiO₂

〇Yusuke Nishimura¹, Yuji Yamanaka¹, Takanobu Watanabe¹ (1.Waseda Univ.)

Keywords:Phase Transition