New index of local atomic structure in amorphous materials for ELNES spectrum interpretation

Presentation information

Oral presentation

13 Semiconductors » 13.3 Insulator technology

Thu. Mar 16, 2023 1:00 PM - 5:45 PM B508 (Building No. 2)

Noriyuki Taoka(Nagoya Univ.), Yoshiki Yamamoto(Renesas Electronics)

4:15 PM - 4:30 PM

〇Yusuke Yuzawa¹, Takanori Asano¹, Hiroki Kawai¹, Kenji Nakamura¹, Daisuke Hagishima¹, Hiroki Tanaka¹ (1.KIOXIA Corp.)

Keywords:alumina, ELNES, STEM