[16p-PA03-1~6] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[16p-PA03-1] Vertical Cu-MIC poly-Ge TFT on a glass substrate

〇Kotaro Kusunoki¹, Syo Suzuki¹, Kosei Suzuki¹, Akito Hara¹ (1.Tohoku Gakuin Univ.)

Keywords:Vertical, Ge, TFT