[16p-PA03-1~6] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[16p-PA03-4] Investigation of Dry Etching Technique on the Surface of POFs for Sensor Applications

〇Ryo Nakashima¹, Takuto Nakanishi¹, Heeyoung Lee², Yosuke Mizuno³, Daisuke Yamane¹ (1.Rits. Univ., 2.SIT, 3.YNU)

Keywords:Plastic optical fibers, dry etching, reactive ion etching

In this paper, to realize microfabrication technology on the surface of Per-Fluorinated Plastic Optical Fibers (PF-POF) and apply it to sensors, we investigate a dry etching technique of PC (Polycarbonate) reinforcing layer using RIE (Reactive Ion Etching). This experiment aims to partially remove PC reinforcing layer of PF-POF. The experimental results show that dry etching of PC reinforcing layer of PF-POF was possible by using RIE with oxygen plasma, and the prospect of realizing a microfabrication technique for PF-POF surfaces for sensor applications is obtained.