1:30 PM - 3:30 PM
[16p-PA04-18] Investigation of nitride semiconductor integrated circuits for driving small actuators
Keywords:nitride semiconductor, integrated-circuit
We investigate nitride semiconductor integrated circuits that drive small ultrasonic motors. The basic specifications are (1) the drive frequency should be variable at around 1 MHz, (2) only E/D type n-channel MOSFETs should be used, and (3) passive elements should also be monolithically integrated. Based on these basic specifications, circuit design is performed using Si n-MOS parameters. The SPICE simulator was able to generate the pulse waveforms required to drive an ultrasonic motor, and an NMOS integrated circuit with voltage-controllable oscillation frequency was designed.