The 70th JSAP Spring Meeting 2023

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13 Semiconductors » 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[17a-A403-1~10] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

Fri. Mar 17, 2023 9:00 AM - 11:45 AM A403 (Building No. 6)

Kiyoshi Takeuchi(Univ. of Tokyo)

9:00 AM - 9:15 AM

[17a-A403-1] 1DEG calculation of nanosheet MOSFETs

〇Koichi Fukuda1, Mariko Ninomiya1, Junichi Hattori1 (1.AIST)

Keywords:nano sheet mosfet, Poisson Schroedinger, 1DEG

1DEG calucation results of nano sheet MOSFETs are presented.