Self-heating and Short-Channel Effect Immunity with Partial-Bottom-Dielectric-Isolation for Gate-All-Around Nano-Sheet FETs

Peilong Wang; Atsushi Hori; Iriya Muneta; Takamasa Kawanago; Kuniyuki Kakushima; Kazuo Tsutsui; Hitoshi Wakabayashi

Presentation information

Oral presentation

13 Semiconductors » 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[17a-A403-1~10] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

Fri. Mar 17, 2023 9:00 AM - 11:45 AM A403 (Building No. 6)

Kiyoshi Takeuchi(Univ. of Tokyo)

9:45 AM - 10:00 AM

▲ [17a-A403-4] Self-heating and Short-Channel Effect Immunity with Partial-Bottom-Dielectric-Isolation for Gate-All-Around Nano-Sheet FETs

〇(D)Peilong Wang¹, Atsushi Hori¹, Iriya Muneta¹, Takamasa Kawanago¹, Kuniyuki Kakushima¹, Kazuo Tsutsui¹, Hitoshi Wakabayashi¹ (1.Tokyo Institute of Technology)

Keywords:Nano-sheet FETs, FBDI, PBDI

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