Synthesis of AlOx, TiO2 alloy films and multilayer films by mist CVD method

Kojun Yokoyama; Wenbo Fan; Hajime Shirai

Presentation information

Poster presentation

21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[17a-PB01-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Fri. Mar 17, 2023 9:30 AM - 11:30 AM PB01 (Poster)

9:30 AM - 11:30 AM

[17a-PB01-12] Synthesis of AlO_x, TiO₂ alloy films and multilayer films by mist CVD method

〇Kojun Yokoyama¹, Wenbo Fan¹, Hajime Shirai¹ (1.Saitama Univ.)

Keywords:Mist-CVD, AlOx, TiO2, AlTiO, , MOSFET, MOSdiode

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Presentation information

[17a-PB01-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[17a-PB01-12] Synthesis of AlOx, TiO2 alloy films and multilayer films by mist CVD method

[17a-PB01-12] Synthesis of AlO_x, TiO₂ alloy films and multilayer films by mist CVD method