Large area growth of c-axis parallel oriented ZnO films by limiting particle irradiation direction during sputtering deposition

Presentation information

Oral presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.6 Ultrasonics

Fri. Mar 17, 2023 1:30 PM - 4:30 PM D505 (Building No. 11)

Shoji Kakio(Univ. of Yamanashi), Jun Kondoh(Shizuoka Univ.)

2:15 PM - 2:30 PM

〇Naoki Tomiyama¹, Taiki Sato¹, Shinji Takayanagi¹, Takahiko Yanagitani² (1.Doshisha Univ., 2.Waseda Univ.)

Keywords:zinc oxide, piezoelectric film, thickness shear mode