1:30 PM - 3:30 PM
[17p-PA05-2] Detection of ionized space charges using a photonic-crystal-waveguide module
Keywords:photonic crystal, space charges, sensing
We have been developing a sensor for detecting space charges that cause electrostatic accidents, in which Si-photonic-crystal-waveguides are irradiated with electric charges, resulting in free carrier absorption inside and attenuation of the transmitted light intensity. Therefore, we fabricated a small module equipped with a Si photonic crystal waveguide chip and conducted experiments in which the module was irradiated with an electric charge. As a result, it was confirmed that the transmitted light intensity was attenuated and that the reproducibility was high.