[18a-A401-1~9] 23.1 Joint Session N "Informatics"

[18a-A401-6] Combined Bayesian analysis of measurements of thin film X-ray diffractometry and X-ray reflectometry

〇(DC)Yuki Sakishita¹, Huyuki Nabeshima¹, Atsutaka Maeda¹, Koji Hukushima^1,2 (1.Dept. of Basic Sci., Univ. of Tokyo, 2.Komaba Inst. for Sci., Univ. of Tokyo)

Keywords:Bayesian estimation, Markov chain Monte Carlo, replica exchange method

We design a Bayesian model that combines two different sets of experimental data, X-ray reflectivity measurements and thin-film X-ray diffraction measurements, to estimate properties such as film thickness and roughness. As a result, we report that the estimation accuracy is improved compared to the estimation based only on the respective measurement data. In addition, the results of a more complicated model including the spatial distribution of film thickness will also be presented.