Improvement of withstand voltage characteristics of TiN-coated alumina insulator

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.5 Surface Physics, Vacuum

Sat. Mar 18, 2023 1:00 PM - 5:15 PM D519 (Building No. 11)

Naoka Nagamura(NIMS), Kei Mitsuhara(KOBELCO RESEARCH INSTITUTE, INC.)

1:30 PM - 1:45 PM

〇Ryotaro Kakutani¹, Akio Ogura¹, Hiromitsu Nogi¹, YAO Yuanzhao¹, Souichi Katagiri¹ (1.Univ. of Tsukuba)

Keywords:creeping discharge, secondary electron emission yield, sheet resistivity