Control of O-polar and Zn-plolar ZnO film growth and application to polarity inversion multilayer piezoelectric devices

Presentation information

Special Issue: High-Performance Electronic Components and Materials for Smart Society

Tue. Oct 22, 2019 3:55 PM - 4:45 PM Room II (1F, Symposion Hall)

Chairperson:Yoshihito IMANAKA(FUJITSU LABORATORIES LTD.)

4:15 PM - 4:30 PM

*Tsuyoshi Majima^1,3, Takahiko Yanagitani^1,2,3 (1. Waseda University, 2. JST PRESTO, 3. ZAIKEN)

Keywords:ZnO piezoelectric thin films, Polarity inverted multilayer, Ultrasonic transducer

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