Crystal structure analysis of giant piezoelectric ScAlN by thick film growth and pulverization

Presentation information

Special Issue: High-Performance Electronic Components and Materials for Smart Society

Tue. Oct 22, 2019 3:55 PM - 4:45 PM Room II (1F, Symposion Hall)

Chairperson:Yoshihito IMANAKA(FUJITSU LABORATORIES LTD.)

4:30 PM - 4:45 PM

*Ningrui Bai^1,2, Takahiko YANAGITANI^1,2,3 (1. Waseda University, 2. ZAIKEN, 3. JST PRESTO)

Keywords:ScAlN powder, lattice constant

Abstract password authentication.
Password is required to view the abstract. Please enter a password to authenticate.