Autumn Meeting of the Japan Society of Powder and Powder Metallurgy, 2021

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General Session

On-demand Video Distribution (General Session) » General Session: Dielectric Properties

General Session: Dielectric Properties

Chairperson:Hiroya SAKURAI(National Institute for Materials Science (NIMS)), Masaki KATO(Doshisha University)

[8-40A] Preparation and dielectric characterization of Sr1+xTaO2+yN1-z polycrystalline thin film

〇Shuto Kano1 (1.TDK Corporation)

Keywords:Oxynitride, Dielectric characterization, Thin film

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