<strong>Development of MgO-based ceramics with excellent corrosion resistance against plasma etching</strong>

Takashi Ikeda

Presentation information

Poster presentation

B » B-1:Hard Materials

[P-B1] Hard Materials

Tue. Nov 7, 2017 7:00 PM - 8:30 PM Room D_P-6 (2F, International Conference Hall III)

Presentation Time: November 7 (Tue) 19:00-20:30
Core Time: odd number;19:00-19:45 even number:19:45-20:30

7:00 PM - 8:30 PM

[P-B1-01] Development of MgO-based ceramics with excellent corrosion resistance against plasma etching

*Takashi Ikeda¹, Yuji Kasashima², Fumihiko Uesugi², Kota Tsutsumi¹ (1. NIPPON TUNGSTEN CO.,LTD.(Japan), 2. Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology(AIST)(Japan))

Keywords:corrosion resistance, plasma etching, MgO, composite ceramics, semiconductor

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