Deep-UV laser writing of submicron patterns by chemical solution process: ZnO and HfO2

Fabien Grasset

Presentation information

Oral presentation » A-1 Powder and Colloidal Processing

A-1 Powder and Colloidal Processing

Wed. Oct 18, 2023 10:30 AM - 12:30 PM Room B (Clover Hall)

Chairpersons:Tomoya OHNO(Kitami Institute of Technology, Japan), Yoshitake MASUDA(National Institute of Advanced Industrial Science and Technology, Japan)

12:10 PM - 12:30 PM

[18B-A1-09] Deep-UV laser writing of submicron patterns by chemical solution process: ZnO and HfO2

*Fabien Grasset^1,3, Quentin Kirscher², Vanessa Proust^1,3, Olivier Soppera², Dominique Berling², Naoki Ohashi^3,1, Tetsuo Uchikoshi^3,1, Ngan Nguyen^3,1 (1. IRL3629 LINK (Japan), 2. UMR7361 IS2M (France), 3. Research Center for Electronic and Optical Materials, NIMS (Japan))

Keywords:DUV, Thin film, Chemical solution process, nanocolloid

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