[1Dp01-13] TF/SE/EMP/MI/MS

[1Dp08] VO₂ thin film growth on polyimide sheet and electrical properties after peeling

*kunio okimura¹, Yuta Miyatake², Toshihiro Nakanishi³ (1. Faculty of Engineering, Tokai University, 2. Graduate School of Engineering, Tokai University, 3. Graduate School of Engineering, Kyoto University)

In this study, VO₂ thin films were deposited on polyimide films grown on glass or quartz substrates. Resistance changes against temperature were measured before and after peeling off the polyimide film from glass or quartz substrates. Even after peeling off from the substrate, VO₂ showed insulator-metal transition property with resistance change more than two orders of magnitudes. We realized flexible sheets coated with phase transition VO₂ films.