2023年日本表面真空学会学術講演会

講演情報

口頭発表

[1Cp01-07] Surface Analysis/Applied Surface Science/Evaluation Technique (ASS)

2023年10月31日(火) 14:00 〜 16:15 大会議室234 (3階)

Chair:李 艶君(大阪大学)、村上 健司(静岡大学)

15:30 〜 15:45

[1Cp05] Development of new display analyzer CoDELMA and atom-holography microscope

*Hiroshi Daimon1, Hiroki Momono2, Hiroyuki Matsuda1, Fumihiko Matsui1, Laszlo Toth3, Yu Masuda4, Koichi Moriguchi4, Keiko Ogai4, Yusuke Hashimoto5, Tomohiro Matsushita5 (1. Institute for Molecular Science, 2. National Institute of Technology, Yonago, 3. SciTech Muszer Kft, 4. APCO Ltd., 5. Nara Institute of Science and Technology)

We are developing a new high-energy-resolution display analyzer CoDELMA. CoDELMA is the only two-dimensional electron spectrometer that can display the angular distribution of particular high-energy electrons with a high-energy-resolution of ΔE/E = 1/500 over a wide two-dimensional angular range of ±50° at once. The use of a synchrotron facility is an obstacle to the use of holography for routine analysis. Hence we are developing atom-holography microscope by a combination of a scanning electron microscope (SEM) and CoDELMA. This new microscope enables us to easily analyze the 3D atomic arrangement around specific atoms at each nano region observed by SEM in the laboratory. Recent results are shown in the presentation.

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