[1Cp01-07] Surface Analysis/Applied Surface Science/Evaluation Technique (ASS)

[1Cp05] Development of new display analyzer CoDELMA and atom-holography microscope

*Hiroshi Daimon¹, Hiroki Momono², Hiroyuki Matsuda¹, Fumihiko Matsui¹, Laszlo Toth³, Yu Masuda⁴, Koichi Moriguchi⁴, Keiko Ogai⁴, Yusuke Hashimoto⁵, Tomohiro Matsushita⁵ (1. Institute for Molecular Science, 2. National Institute of Technology, Yonago, 3. SciTech Muszer Kft, 4. APCO Ltd., 5. Nara Institute of Science and Technology)

We are developing a new high-energy-resolution display analyzer CoDELMA. CoDELMA is the only two-dimensional electron spectrometer that can display the angular distribution of particular high-energy electrons with a high-energy-resolution of ΔE/E = 1/500 over a wide two-dimensional angular range of ±50° at once. The use of a synchrotron facility is an obstacle to the use of holography for routine analysis. Hence we are developing atom-holography microscope by a combination of a scanning electron microscope (SEM) and CoDELMA. This new microscope enables us to easily analyze the 3D atomic arrangement around specific atoms at each nano region observed by SEM in the laboratory. Recent results are shown in the presentation.