[1Cp01-07] Surface Analysis/Applied Surface Science/Evaluation Technique (ASS)

[1Cp06] FIB-prepared clean microcrystal on solid substrate for surface spectroscopy

*Fumio Komori^1,2, Yanze Guan¹, Masafumi Horio¹, Atsushi Fukuda², Yuki Tsujikawa¹, Kenichi Ozawa³, Masao Kamiko², Daisuke Hamane¹, Taizo Kawauchi², Katsuyuki Fukutani², Yuki Tokumoto², Keiichi Edagawa², Ryuji Tamura⁴, Iwao Matsuda¹ (1. The Institute for Solid State Physics, The University of Tokyo, 2. Institute of Industrial Sceince, The University of Tokyo, 3. Institute of Materials Structure Science, High Energy Accelerator Research Organization, 4. Faculty of Advanced Engineering, Tokyo University of Science)

Recent developments in microscopy technique have made it possible to use small crystals for surface-sensitive and high-resolution micro-spectroscopy such angle-resolved photoemission spectroscopy (ARPES). In the present study, we develop a new microfabrication method for anchoring small crystals to solid substrates based on focused ion beam (FIB)-scanning electron microscopy to investigate their electronic properties in detail using surface-sensitive spectroscopic methods. The present surface remain clean and ordered while the samples prepared by FIB are usually contaminated and/or amorphized by the focused ions. We demonstrate the band structure can be measured by micro-ARPES for the graphite sample prepared by this method.