[1Ia01-07] Vacuum Science Technology (VST)

[1Ia01] Vacuum properties of new anodised aluminium films

*Hiroki Kurisu¹, Kentarou Fukuda¹, Naoya Furuno¹, Eisaku Kuninobu², Yukio Azuma² (1. Graduate School Science and Engineering for Innovation, Yamaguchi University, 2. Chugoku Denka Kogyo Corporation)

We have developed a new anodised aluminium coating with a lower oxygen ratio than conventional coatings, which has a more flexible structure and higher durability. Compared with conventional samples, the developed anodised aluminium film has a higher heat resistance of 300°C. The outgassing rate of the developed anodised aluminium sample is one order of magnitude lower than that of the conventional anodised aluminium sample.