[1P01-52] Poster Presentation

[1P29] Electrical and optical properties of flexible VO₂ films with insulator-metal transition grown on nanorod ZnO buffered polyimide sheet

*Yukito Ozawa¹, Kunio Okimura¹ (1. Graduate School of Engineering, Tokai University)

Vanadium dioxide (VO₂) transits to a tetragonal crystal structure from a monoclinic crystal structure at a temperature of about 68°C concomitant with a resistance change over four orders of magnitude, so-called insulator-metal transition (IMT). We prepared VO₂ thin films on polyimide sheets on quartz by using biased sputtering method. Zinc oxide nanorod (ZnO_NR) was employed as buffer layer in addition to zinc oxide bare layer (ZnO_seed). Improvement of crystalline growth with lower substrate bias was achieved by introducing ZnO_NR buffer. The low substrate bias was also effective for reducing occurrence of cracking of VO₂ films.