[2Bp01-10] Surface Analysis/Applied Surface Science/Evaluation Technique (ASS)

[2Bp05] Evaluation of strength and crystallinity of structures fabricated by laser-assisted electrophoretic deposition

*Yuki Yoshimoto¹, Kenta Nakazawa¹, Makoto Ishikawa², Atsushi Ono^1,3, Futoshi Iwata^1,2,3 (1. Graduate School of Integrated Science and Technology, Shizuoka University, 2. Hamamatsu Instrumental Analysis Center, Shizuoka University, 3. Research Institute of Electronics, Shizuoka University)

Recently, three-dimensional (3D) micro-fabrication techniques have been developed with increasing demand for microdevices. Additive manufacturing techniques can fabricate 3D structures by simple process. We have developed laser-assisted electrophoretic deposition (LAEPD), which combines laser trapping and electrophoretic deposition for the microfabrication of 3D structures. However, because the fabricated structures are composed of aggregates of particles, their mechanical strength is significantly lower than that of the bulk. In this study, we developed an in-process sintering method for LAEPD using a laser for sintering by localized surface plasmon resonances. The mechanical strength of the fabricated pillar was measures from the deflection of the pillar applied a calibrated load using a microcantilever. The mechanical strength of the pillar increased with increasing sintering time. Furthermore, the crystallization of the cross-section of the pillars was confirmed.