[2Ip01-07] Vacuum Science Technology (VST)

[2Ip01(2023若手学会賞)] Recent studies for vacuum standards ~ static expansion system, dimensional measurements for pressure balances, and optical pressure standard ~

*Yoshinori Takei¹ (1. National Institute of Advanced Industrial Science and Technology (AIST))

Metrology is the basis of science and technology. In order for vacuum gauges to measure the correct value, they must be traceably calibrated to vacuum standards based on physical phenomena. Vacuum standards are managed and developed in National metrology institutes in each country. In Japan, National Metrology Institute of Japan (NMIJ) is one of the organizations of National Institute of Advanced Industrial Science and Technology (AIST). NMIJ has several pressure standards, such as mercury manometer, pressure balances, static expansion system, and orifice-flow method. As a future primary standard, optical pressure standard is under development. I am working the following three studies. First one is improving the static expansion system for calibrating customers gauges. Second one is the dimensional measurements of piston-cylinder for pressure balances. Third one is developing the optical pressure standard. In the presentation, the experimental results are shown.