[2Ip01-07] Vacuum Science Technology (VST)

[2Ip02(2022産業賞)] Development of a high-accuracy mass spectrometer to ensure the quality of automotive sensors.

*Masahide Kuroiwa¹, sam Kishikawa¹, Masanao Sasaki¹, Yuzo Hyashi² (1. Tokyo Electronics Co., Ltd., 2. Vaclab Inc.)

The detection of microleaks in sealed chips is very important for maintaining the quality of MEMS devices and advanced semiconductors. We have achieved the detection of microleaks using 0.2% BeCu technology, which is a material that suppresses outgassing. This innovation significantly improves precision and enables analysis in ultra-high vacuum conditions. We have developed WATMASS GA System to detect microleaks at E-16Pa m³/s (He) for sealing devices like MEMS devices and advanced semiconductors with both non-destructive and destructive methods.