[2Ip01-07] Vacuum Science Technology (VST)

[2Ip03(2022産業賞)] Development of safety guidelines and ISO standardization for turbo-molecular pumps

*Osamu Ashida¹ (1. Shiamdzu Corporation)

A turbomolecular pump is a vacuum pump capable of producing ultrahigh vacuum by rotating the rotor at high speed. The rotational energy is very large, and there is a risk of pump falling and debris scattering by failure of rotor. Japan Vacuum Industry Association held working sessions and published a document on the results of activities in March 2005. Japan proposed a project to create an ISO standard, and a three-year activity began in 2006. In 2007, engineers from Japan, Germany, and France manufacturers, and persons concerned discussed Japan proposals. After four rounds of international vote revisions, with the addition of the test method submitted later by Germany, the international standard was published in 2010 as ISO 27892. It describes two destructive test methods for forcing rotors to break. There are two main types of pump fixing methods when measuring rapid shutdown torque. It describes methods of measuring the torque using strain gauges or force sensors and other means.