[3Cp01-06] ISSP2024 pre-session - A new dawn of sputtering and plasma processes: Sputtering and Plasma Processes Division's Session

[3Cp03] Measurement of spatial electric field distribution in the plasma sheath using spherical fluorescent particles

*Masahiko Inoue¹, daisuke takayama¹, daisuke hiro¹, toshihiro taguchi², yuma karaki³, sangwoon park¹ (1. Graduate School of Science and Technology, Setsunan University, 2. Japan Atomic Energy Agency, 3. Nara Institute of Science and Technology)

In this study, we attempted to measure the spatial electric field distribution in the sheath by using spherical particles of synthetic resin containing a fluorescent substance. The fluorescent particles used in the experiments are made of acrylic and have nominal particle diameters of 10μm (blue emission) and 40μm (green emission) .When these particles were injected into the plasma, smaller blue particles were levitated at relatively higher region, while larger green particles were levitated at the lower region. Assuming of the particle diameters of the particles levitated at several points, we could estimate the electric fields at these points. Our new method has a lot of capabilities for the measurement of the spatial structure of the sheath plasma.